Roch Mechatronics Inc. Freezing and Cooling equipment are backed up by 20 years of strong hard core exprience.
Application includes vacuum, Nano technologies, Spectrophotometry.
The precision of thermoelectric & Refrigerant type
• Digital Controler with indicator/PID controls.
• Small Footprint
• Temperature control with high accuracy
• PUF Insulation CFC Free.
• Leakage Detection Function, touch Screen
• Leakage current monitoring
Chiller is one of the most important equipment of an etching & CVD equipment to keep the temperature of wafer & chamber stable at certain level.
Especially, Roch Mechatronics Inc. have two type chiller, compressor type chiller & unlikely from conventional compressor type chiller, operates by the Thermoelectric module which provides Solid State cooling. This is the equipment with high accuracy and high reliability.