What are MEMS?
 Microelectromechanical Systems
 Micro: sizes ranging from nm to mm
 Electro: signal/ control (sense,compute, etc.)
 Mechanical: structure/functioning(actuate, etc.)
 System: integration, communicate,control

Constraints of Bio MEMS
 Material requirements
 Biocompatibility
 Mechanical compatibility
 Chemical resistance
 Polymer MEMS
 Advantage
 Biocompatible and biodegradable
 Better mechanical shock tolerance
 Low cost
 Disadvantage
 Mechanical properties change dramatically over a narrow temperature
range (low glass transition temperature and melting point)
 Gas/moisture permeable, will need hermetic packaging