What are MEMS?
Microelectromechanical Systems
Micro: sizes ranging from nm to mm
Electro: signal/ control (sense,compute, etc.)
Mechanical: structure/functioning(actuate, etc.)
System: integration, communicate,control
Constraints of Bio MEMS
Material requirements
Biocompatibility
Mechanical compatibility
Chemical resistance
Polymer MEMS
Advantage
Biocompatible and biodegradable
Better mechanical shock tolerance
Low cost
Disadvantage
Mechanical properties change dramatically over a narrow temperature
range (low glass transition temperature and melting point)
Gas/moisture permeable, will need hermetic packaging